Freistaat Bayern vertreten durch die Technische Universität München, hier handelnd die Forschungs-Neutronenquelle Heinz Maier-Leibnitz (FRM II)GarchingTED
Deposition Tool 8 Inch
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a U...
Submission deadline: October 05, 2026Type: Tender
Measurement Technology, Laboratory Instruments, Process Technology
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Freistaat Bayern vertreten durch die Technische Universität München, hier handelnd die Forschungs-Neutronenquelle Heinz Maier-Leibnitz (FRM II)
- Published:
- August 20, 2026
- Deadline:
- October 05, 2026
- Topic:
- Measurement Technology
Tender description
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber for oxidation, a UHV chamber for Ar ion milling, and a flipping station. The system must allow metalizing both sides of the wafers in situ, with minimal backside particle contamination. The wafers should only be touched on the side (edge gripping).
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- The submission deadline is 05. Oktober 2026.
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