Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.Erlangen
Process Monitoring Tool
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to th...
Conveyor Systems, Measurement Technology, Laboratory Instruments, Process Technology
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Published:
- August 25, 2026
- Deadline:
- Not specified
- Topic:
- Conveyor Systems
Tender description
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.
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