Fraunhofer-Gesellschaft - Einkauf B12TED
CMP Upgrade Reflexion 3 (IPMS-CNT11.1) - PR880735-2480-P
Upgrade der CMP-Anlage Reflexion LK (S/N 410249) von Applied Materials am Fraunhofer IPMS von Generation 3 auf 5. Umfang: Austausch aller Handhabungsroboter und Software-Update zur Sicherung der Ersatzteilversorgung und Anlagenverfügbarkeit. Optionale Leistungen: WIN10/11-Installation für Rezepterstellung, Risikobewertungen, Austausch von...
Generators, Conveyor Systems, Process Technology
No credit card · Instant access
Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Fraunhofer-Gesellschaft - Einkauf B12
- Published:
- March 10, 2026
- Deadline:
- Not specified
- Topic:
- Generators
Tender description
Upgrade der CMP-Anlage Reflexion LK (S/N 410249) von Applied Materials am Fraunhofer IPMS von Generation 3 auf 5. Umfang: Austausch aller Handhabungsroboter und Software-Update zur Sicherung der Ersatzteilversorgung und Anlagenverfügbarkeit. Optionale Leistungen: WIN10/11-Installation für Rezepterstellung, Risikobewertungen, Austausch von Motorkabeln, Werksinterface-Roboter und Nassroboter nach Audit-Bedarf sowie eine Gewährleistungsverlängerung um 12 Monate.
Further details
With free access, documents, deadlines and submission notes are available in a structured format.
- Core requirements of the tender prioritized and prepared
- Deadlines, eligibility criteria and documents in one workflow
- Guidance for structured bid preparation
- Automatically discover matching follow-up tenders
30 days free · no credit card · cancel anytime
All procurement details
Buyer, lots, participants, locations, documents, and procedure data have already been captured. Open any area to see the complete information in your workspace.
7 data areas available
30 days free · no credit card · cancel anytime
Documents
Unlock50 details capturedDocuments · Document bundle
Buyer
Unlock3 details capturedBuyer · Address · Contact
Lots
Unlock1 detail capturedLots LOT-0000
Procedure data
Unlock6 details capturedPublication number · Procedure reference · Buyer reference · Procedure type · +2 more
Performance locations
Unlock2 details capturedPerformance locations
Bidders and contractors
Unlock3 details capturedBidders and contractors · Address · Contact
Publisher
Unlock6 details capturedPublisher · Address · Contact
Related tenders
8Raider Edge Plating Upgrade (IPMS-CNT12.01; IPMS-CNT12.02; IPMS-CNT12.03; IPMS-CNT12.04) - PR873511-2480-P
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.Upgrade einer AMAT Raider Edge 300 mm Waferplattierungsplattform am Fraunhofer IPMS-CNT. Leistungsumfang: Wafer Pre-Aligner, optional Precision Drive Head Upgrade (CFD3LM), Velocity Chamber und SRD Chamber Upgrade. Optional: 24 Monate erweiterte Garantie, Verbrauchsmaterialien für Prozessabnahme (Filter, VMS, Additive) sowie Prozessoptimierungssoftware für CFD3M- und Raptor-Kammer. Die optionalen Positionen müssen die spezifizierten technischen Anforderungen erfüllen.Single Wafer ALD for TiN (IPMS-MRS05.1) - PR896468-2480-P
Fraunhofer-Gesellschaft - Einkauf B121 Stück Single Wafer ALD for TiN Es wird eine Einzelwafer-Atomschichtabscheidungsanlage für TiN sowie für Al2O3 und SiO2 adressiert. Das System muss mit einer ferngesteuerten Plasmaquelle entweder für den TiN-Prozess oder für die Vorbehandlung der Oberfläche direkt vor der ALD ausgestattet sein. Dieses System ist für zwei wichtige Anwendungen in der Prozesslinie erforderlich. Eine Anwendung ist die Abscheidung einer TiN-Barriere innerhalb von TSV für die fortgeschrittene Integration von MEMS-ChiPlasma Activation Tool (IPMS-MRS14.3) - PR1091613-2480-P
Fraunhofer-Gesellschaft - Einkauf B121 Piece - Plasma Activation Tool (IPMS-MRS14.3) Option 1 (LV Pos. 2.1): Please offer an extended warranty of further 12 months (in total 24 month) Option 2 (LV Pos. 3.2): The tool should handle wafers with the size of Option 3 (LV Pos. 3.6): The equipment provides a chuck for wafer size of 300mm Option 4 (LV Pos. 3.8): The machine can handle a tape mounted wafer with dicing frame for 300mm wafer according to IPMS specificationLPCVD Cluster (TEOS/nitride/poly/oxidation) (IPMS-MRS06.1) - PR1121717-2480-P
Fraunhofer-Gesellschaft - Einkauf B12Deadline: Apr 101 Stück - LPCVD Cluster Optionen: Option 1 - LV Pos. 2.3 - Wafer thickness for thick wafers Option 2 - LV Pos. 13.3 - The tool is covered by an extended warranty. Please provide information what is covered within this extended warranty (e.g. support, repair and part cost).ALD System (Dielectric) (IPMS-CNT06.1) - PR1146101-2480-P
Fraunhofer-Gesellschaft, Einkauf B12Deadline: Mar 201 Stück ALD System (Dielectric) (IPMS-CNT06.1) Eine Anlage zum Aufbringen von Metallnitriden und dielektrischen Schichten mittels thermischer ALD-Verarbeitung auf Wafern mit einem Durchmesser von 300 mm. Details siehe Vergabeunterlagen. Optionale Positionen gemäß Technical Tender Specification (Phase 2 des Vergabeverfahrens)CD-SEM Measurement System (IPMS-MRS03.1) - PR884397-2480-P
1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible clean-roam class 10 (approx. ISO 4) production environment. Optional service items: 1.15 General requirements The system is equipped with an uninterruptible power supply (UPS). Yes 3.3 Measurement system The traceable certified standard is part of the delivery. The calibrations are not older than 20% of the recommended calibration interval at the time of delivery. Note: A traceable certified standard can be provided by the supplier. Otherwise, Fraunhofer IPMS will provide a VLSI-certified standard. Yes 4.16 Process The system is capable of performing 3D measurements using a tilted beam. Yes 4.17 Process The system can detect and visualize backscattered electrons (BSE). It is possible to perform CD measurements on the BSE image. Yes 8.2 Optional tool features Please provide an offer for a set of consumables (lamps, O-rings, valves, etc.). Yes 8.4 Optional tool features Please provide a separate offer for typical spare parts such as axis encoder, laser interferometer, etc. Yes 11.4 Extended Warranty Should offered extended warranty starting from the date on which the statutory warranty expires. An extended warranty of further 12 months should be offered. During the warranty period all support, repair and parts cost should be covered. 12 monthsX-ray based measurement system (IPMS-MRS10.1) - PR1114595-2480-P
Fraunhofer-Gesellschaft - Einkauf B121 piece - Ultrasonic or X-Ray based measurement system Options: Option 1 - LV Pos. 16.2 - Contamination level for non-precious metals (" Al, Ti ≤ 50.0*E10 at/cm², all other metals ≤ 5.0*E10 at/cm²") Option 2 - LV Pos. 16.4 - Contamination level for noble metals (Ag, Au, Pd, Pt, Ru) (Confirmation of precious metal concentration < 0.05*E10 at/cm2 (< LOD)) Option 3 - LV Pos. 20.1 - Please offer to extend the warranty by a further 12 months to a total of 24 months. (Please specify as an option. If an extension of the warranty is offered, the full number of points will be awarded, otherwise 0 points will be awarded.) Option 4 - LV Pos. 20.2 - Please offer an Option to handle transparent substrates (like glas wafers) (Please specify as an option. If an option is offered, the full number of points will be awarded, otherwise 0 points will be awarded.)Probe-station for 2.5D/3D memory device testing (IPMS-CNT01.1) - PR1035458-2480-P
Fraunhofer-Gesellschaft, Einkauf B12Deadline: Mar 06Beschaffung einer Prüfstation für 2.5D/3D-Speicherbauelemente (1 Stück). Optionen: Aktive Kühlung, Niedertemperaturmessungen, temporäre elektrische Entladung des Chucks, Halterung für 6-Zoll-Rechteck-Kantilever-Probecard, manuelle Positionierer (magnetisch, 3-Achsen-XYZ), passende Probenträger und -arme mit geschirmten Anschlüssen (BNC/Triax), einzelne Proben, Magnetfeld- und MOKE-Option. Lieferung umfasst: einmalige Kalibrierung aller Messgeräte, interne SSD, NI LabVIEW-Treiber, Wartungssoftware-Paket, Software-Update für bestehendes System, Bestätigung der elektrischen Sicherheit (DGUV V3), technische Dokumentation, Risikobewertung und Sicherheitsdokumentation gemäß Maschinenrichtlinie 2006/42/EC. Erweiterte Garantie: 1 Jahr zusätzlich zu den kommerziellen Bedingungen.
Frequently asked questions about this tender
- How can I apply for this tender?
- Create a free account on Auftrag One. You will then see all documents, deadlines and submission notes in a structured workflow.
- What is the submission deadline?
- No specific submission deadline is currently stated for this notice.
- Who is the contracting authority?
- The contracting authority is Fraunhofer-Gesellschaft - Einkauf B12.
- Which documents are needed to get started?
- Typically you need the service description, proof of eligibility, deadline notes and possibly form sheets. On Auftrag One these items are displayed in prioritized order.