CD-SEM Measurement System (IPMS-MRS03.1) - PR884397-2480-P
1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible ...
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- Tender type:
- Tender
- Contracting authority:
- Public contracting authority
- Published:
- April 07, 2026
- Deadline:
- Not specified
Tender description
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1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible clean-roam class 10 (approx. ISO 4) production environment. Optional service items: 1.15 General requirements The system is equipped with an uninterruptible power supply (UPS). Yes 3.3 Measurement system The traceable certified standard is part of the delivery. The calibrations are not older than 20% of the recommended calibration interval at the time of delivery. Note: A traceable certified standard can be provided by the supplier. Otherwise, Fraunhofer IPMS will provide a VLSI-certified standard. Yes 4.16 Process The system is capable of performing 3D measurements using a tilted beam. Yes 4.17 Process The system can detect and visualize backscattered electrons (BSE). It is possible to perform CD measurements on the BSE image. Yes 8.2 Optional tool features Please provide an offer for a set of consumables (lamps, O-rings, valves, etc.). Yes 8.4 Optional tool features Please provide a separate offer for typical spare parts such as axis encoder, laser interferometer, etc. Yes 11.4 Extended Warranty Should offered extended warranty starting from the date on which the statutory warranty expires. An extended warranty of further 12 months should be offered. During the warranty period all support, repair and parts cost should be covered. 12 months
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4CD-SEM Measurement System (IPMS-MRS03.1)
Beschreibung: 1 CD-SEM Measurement System Anforderungen für die Top-Down-Messung kritischer Abmessungen von Linien/Zwischenräumen, Löchern/Spalten und anderen feinen Merkmalen, wie z. B. längliche Hile-/Säulenmuster, die während der Waferherstellung auf Halbleiterwafern gebildet werden, unter Verwendung eines CD-SEM mit hohem Durchsatz. Das System wird für die Bearbeitung von MEMS-Wafern in einer CMOS-kompatiblen Clean-Room-Klasse 10 (ca. ISO 4) Produktionsumgebung eingesetzt. Optionale Leistungspositionen: 1.15 Allgemeine Anforderungen Das System ist mit einer unterbrechungsfreien Stromversorgung (USV) ausgestattet. Ja 3.3 Messsystem "Das rückführbare zertifizierte Normal ist Bestandteil der Lieferung. Die Kalibrierungen sind zum Zeitpunkt der Auslieferung nicht älter als 20% des empfohlenen Kalibrierintervalls. Hinweis: Ein rückführbares zertifiziertes Normal kann vom Lieferanten zur Verfügung gestellt werden. Ansonsten stellt das Fraunhofer IPMS ein VLSI-zertifiziertes Normal zur Verfügung." Ja 4.16 Prozess Das System ist in der Lage, 3D-Messungen mit einem geneigten Strahl durchzuführen. Ja 4.17 Prozess Das System kann rückgestreute Elektronen (BSE) erkennen und sichtbar machen. Es ist möglich, CD-Messungen an dem BSE-Bild durchzuführen. Ja 8.2 Optionale Werkzeugeigenschaften Bitte geben Sie ein Angebot für einen Satz von Verbrauchsmaterialien (Lampen, O-Ringe, Ventile usw.) ab. Ja 8.4 Optionale Werkzeugeigenschaften Bitte erstellen Sie ein separates Angebot für typische Ersatzteile wie Achsengeber, Laserinterferometer, etc. Ja 11.4 Verlängerte Gewährleistung Es sollte eine verlängerte Gewährleistung ab dem Datum angeboten werden, an dem die gesetzliche Gewährleistung abläuft. Eine erweiterte Gewährleistung von weiteren 12 Monaten sollte angeboten werden. Während der Gewährleistungszeit sollten alle Kosten für Support, Reparatur und Ersatzteile abgedeckt sein. 12 MonateX-ray based measurement system (IPMS-MRS10.1) - PR1114595-2480-P
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