TEKNOLOGIAN TUTKIMUSKESKUS VTT OYVTTTED
Ion beam trimmer
The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of...
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- Ausschreibungstyp:
- Ausschreibung
- Auftraggeber:
- TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Veröffentlicht:
- 02. September 2026
- Frist:
- Nicht angegeben
Ausschreibungsbeschreibung
The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.
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- Der Auftraggeber ist TEKNOLOGIAN TUTKIMUSKESKUS VTT OY.
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- In der Regel benötigen Sie Leistungsbeschreibung, Eignungsnachweise, Fristenhinweise und ggf. Formblätter. Auf Auftrag One werden diese Punkte priorisiert dargestellt.