Freistaat Bayern vertreten durch die Technische Universität München, hier handelnd die Forschungs-Neutronenquelle Heinz Maier-Leibnitz (FRM II)GarchingTED
Deposition Tool 8 Inch
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a U...
Angebotsfrist: 05. Oktober 2026Typ: Ausschreibung
Messtechnik, Laborinstrumente, Verfahrenstechnik
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- Ausschreibungstyp:
- Ausschreibung
- Auftraggeber:
- Freistaat Bayern vertreten durch die Technische Universität München, hier handelnd die Forschungs-Neutronenquelle Heinz Maier-Leibnitz (FRM II)
- Veröffentlicht:
- 20. August 2026
- Frist:
- 05. Oktober 2026
- Thema:
- Messtechnik
Ausschreibungsbeschreibung
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber for oxidation, a UHV chamber for Ar ion milling, and a flipping station. The system must allow metalizing both sides of the wafers in situ, with minimal backside particle contamination. The wafers should only be touched on the side (edge gripping).
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- Wie kann ich mich auf diese Ausschreibung bewerben?
- Erstellen Sie ein kostenloses Konto auf Auftrag One. Danach sehen Sie alle Unterlagen, Fristen und Hinweise zur Einreichung in einem strukturierten Ablauf.
- Bis wann läuft die Angebotsfrist?
- Die Angebotsfrist endet am 05. Oktober 2026.
- Wer ist der Auftraggeber?
- Der Auftraggeber ist Freistaat Bayern vertreten durch die Technische Universität München, hier handelnd die Forschungs-Neutronenquelle Heinz Maier-Leibnitz (FRM II).
- Welche Unterlagen sind für den Start relevant?
- In der Regel benötigen Sie Leistungsbeschreibung, Eignungsnachweise, Fristenhinweise und ggf. Formblätter. Auf Auftrag One werden diese Punkte priorisiert dargestellt.