Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.TED
Raider Edge Plating Upgrade (IPMS-CNT12.01; IPMS-CNT12.02; IPMS-CNT12.03; IPMS-CNT12.04) - PR873511-2480-P
Upgrade einer AMAT Raider Edge 300 mm Waferplattierungsplattform am Fraunhofer IPMS-CNT. Leistungsumfang: Wafer Pre-Aligner, optional Precision Drive Head Upgrade (CFD3LM), Velocity Chamber und SRD Chamber Upgrade. Optional: 24 Monate erweiterte Garantie, Verbrauchsmaterialien für Prozessabnahme (Filter, VMS, Additive) sowie Prozessoptimi...
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- Tender type:
- Tender
- Contracting authority:
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Published:
- March 26, 2026
- Deadline:
- Not specified
Tender description
Upgrade einer AMAT Raider Edge 300 mm Waferplattierungsplattform am Fraunhofer IPMS-CNT. Leistungsumfang: Wafer Pre-Aligner, optional Precision Drive Head Upgrade (CFD3LM), Velocity Chamber und SRD Chamber Upgrade. Optional: 24 Monate erweiterte Garantie, Verbrauchsmaterialien für Prozessabnahme (Filter, VMS, Additive) sowie Prozessoptimierungssoftware für CFD3M- und Raptor-Kammer. Die optionalen Positionen müssen die spezifizierten technischen Anforderungen erfüllen.
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Related tenders
4Raider Edge Plating Upgrade (IPMS-CNT12.01; IPMS-CNT12.02; IPMS-CNT12.03; IPMS-CNT12.04)
Upgrade einer AMAT Raider Edge 300 mm Waferplattierungsplattform am Fraunhofer IPMS-CNT. Leistungsumfang: Wafer Pre-Aligner, Precision Drive Head Upgrade (CFD3LM), Velocity Chamber und SRD Chamber Upgrade. Optionale Positionen: 24 Monate erweiterte Garantie, Verbrauchsmaterialien für die Prozessabnahme (Filter, VMS, Additive) sowie Prozessoptimierungssoftware für CFD3M- und Raptor-Kammern. Die optionalen Upgrades müssen die spezifizierten technischen Anforderungen erfüllen.CMP Upgrade Reflexion 3 (IPMS-CNT11.1) - PR880735-2480-P
Fraunhofer-Gesellschaft - Einkauf B12Upgrade der CMP-Anlage Reflexion LK (S/N 410249) von Applied Materials am Fraunhofer IPMS von Generation 3 auf 5. Umfang: Austausch aller Handhabungsroboter und Software-Update zur Sicherung der Ersatzteilversorgung und Anlagenverfügbarkeit. Optionale Leistungen: WIN10/11-Installation für Rezepterstellung, Risikobewertungen, Austausch von Motorkabeln, Werksinterface-Roboter und Nassroboter nach Audit-Bedarf sowie eine Gewährleistungsverlängerung um 12 Monate.Plasma Activation Tool (IPMS-MRS14.3) - PR1091613-2480-P
Fraunhofer-Gesellschaft, Einkauf B12Deadline: May 12Lieferung von 1 Stück Plasma Activation Tool (IPMS-MRS14.3). Optionen: 1) Erweiterte Garantie um weitere 12 Monate (insgesamt 24 Monate). 2) Handhabung von Wafern mit definierter Größe. 3) Chuck für 300mm-Wafer. 4) Handhabung von tape-mounted Wafern mit Dicing-Frame für 300mm-Wafer gemäß IPMS-Spezifikation.CD-SEM Measurement System (IPMS-MRS03.1) - PR884397-2480-P
1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible clean-roam class 10 (approx. ISO 4) production environment. Optional service items: 1.15 General requirements The system is equipped with an uninterruptible power supply (UPS). Yes 3.3 Measurement system The traceable certified standard is part of the delivery. The calibrations are not older than 20% of the recommended calibration interval at the time of delivery. Note: A traceable certified standard can be provided by the supplier. Otherwise, Fraunhofer IPMS will provide a VLSI-certified standard. Yes 4.16 Process The system is capable of performing 3D measurements using a tilted beam. Yes 4.17 Process The system can detect and visualize backscattered electrons (BSE). It is possible to perform CD measurements on the BSE image. Yes 8.2 Optional tool features Please provide an offer for a set of consumables (lamps, O-rings, valves, etc.). Yes 8.4 Optional tool features Please provide a separate offer for typical spare parts such as axis encoder, laser interferometer, etc. Yes 11.4 Extended Warranty Should offered extended warranty starting from the date on which the statutory warranty expires. An extended warranty of further 12 months should be offered. During the warranty period all support, repair and parts cost should be covered. 12 months
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