Fraunhofer-Gesellschaft - Einkauf B12TED
X-ray based measurement system (IPMS-MRS10.1) - PR1114595-2480-P
Beschaffung eines Ultraschall- oder röntgenbasierten Messsystems (1 Stück). Optionale Anforderungen: 1. Kontaminationsgrad für Nicht-Edelmetalle (Al, Ti ≤ 50.0*E10 at/cm², andere ≤ 5.0*E10 at/cm²), 2. Kontaminationsgrad für Edelmetalle (Ag, Au, Pd, Pt, Ru < 0.05*E10 at/cm²), 3. Optionale Garantieverlängerung um 12 auf insgesamt 24 Monate,...
Measurement Technology
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Fraunhofer-Gesellschaft - Einkauf B12
- Published:
- April 28, 2026
- Deadline:
- May 22, 2026
- Topic:
- Measurement Technology
Tender description
Beschaffung eines Ultraschall- oder röntgenbasierten Messsystems (1 Stück). Optionale Anforderungen: 1. Kontaminationsgrad für Nicht-Edelmetalle (Al, Ti ≤ 50.0*E10 at/cm², andere ≤ 5.0*E10 at/cm²), 2. Kontaminationsgrad für Edelmetalle (Ag, Au, Pd, Pt, Ru < 0.05*E10 at/cm²), 3. Optionale Garantieverlängerung um 12 auf insgesamt 24 Monate, 4. Optionale Handhabung transparenter Substrate (z. B. Glas-Wafer).
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Related tenders
2X-ray based measurement system (IPMS-MRS10.1)
Fraunhofer-Gesellschaft - Einkauf B12Deadline: May 15Beschaffung von 1 Stück eines auf Röntgenstrahlung basierenden Messsystems (IPMS-MRS10.1). Optionen: 1. Kontaminationsniveau für unedle Metalle (Al, Ti ≤ 50.0*E10 at/cm², andere ≤ 5.0*E10 at/cm²). 2. Bestätigung von Edelmetallkonzentrationen < 0.05*E10 at/cm². 3. Erweiterung der Garantie um 12 Monate auf insgesamt 24 Monate. 4. Option zur Handhabung transparenter Substrate (z.B. Glaswafer).CD-SEM Measurement System (IPMS-MRS03.1) - PR884397-2480-P
1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible clean-roam class 10 (approx. ISO 4) production environment. Optional service items: 1.15 General requirements The system is equipped with an uninterruptible power supply (UPS). Yes 3.3 Measurement system The traceable certified standard is part of the delivery. The calibrations are not older than 20% of the recommended calibration interval at the time of delivery. Note: A traceable certified standard can be provided by the supplier. Otherwise, Fraunhofer IPMS will provide a VLSI-certified standard. Yes 4.16 Process The system is capable of performing 3D measurements using a tilted beam. Yes 4.17 Process The system can detect and visualize backscattered electrons (BSE). It is possible to perform CD measurements on the BSE image. Yes 8.2 Optional tool features Please provide an offer for a set of consumables (lamps, O-rings, valves, etc.). Yes 8.4 Optional tool features Please provide a separate offer for typical spare parts such as axis encoder, laser interferometer, etc. Yes 11.4 Extended Warranty Should offered extended warranty starting from the date on which the statutory warranty expires. An extended warranty of further 12 months should be offered. During the warranty period all support, repair and parts cost should be covered. 12 months
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- The submission deadline is 22. Mai 2026.
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