Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für HöchstfrequenztechnikBerlinTED
Prior Information Notice – Maskless Laser Lithography System
The Ferdinand-Braun-Institut (FBH) plans to procure a high-performance maskless laser lithography system within the framework of the EU-funded APECS programme. The system will be used for high-resolution patterning of semiconductor wafers to support the development of advanced heterointegration technologies, including InP- and GaAs-based ...
Submission deadline: July 11, 2026 (expired)Type: Tender
Measurement Technology, Laboratory Instruments
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- Tender type:
- Tender
- Contracting authority:
- Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik
- Published:
- June 10, 2026
- Deadline:
- July 11, 2026
- Topic:
- Measurement Technology
Tender description
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The Ferdinand-Braun-Institut (FBH) plans to procure a high-performance maskless laser lithography system within the framework of the EU-funded APECS programme. The system will be used for high-resolution patterning of semiconductor wafers to support the development of advanced heterointegration technologies, including InP- and GaAs-based chiplets. It is intended to enable rapid prototyping as well as efficient processing of wafers with diameters up to 200 mm. The equipment must provide sub-micron precision combined with high throughput and support modern multi-beam laser writing technologies. It will be installed in a cleanroom environment and must comply with ISO class 5 requirements. The procurement procedure is planned for 2026.
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- The submission deadline is 11. Juli 2026.
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- The contracting authority is Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik.
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