IHP GmbH - Leibniz-Institut für innovative MikroelektronikFrankfurt (Oder)TED
Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration
Upgrade eines bestehenden 200 mm Wolfram-CVD-Systems (AMAT) auf WxZ Sprint Konfiguration: Lieferung, Integration und Inbetriebnahme von Hard- und Software sowie Modifikation des Gasverteilungssystems für gepulste Wolfram-Abscheidung (High Aspect Ratio Gap-Fill) und Integration zusätzlicher Hardware für Depositionsdrücke bis 300 Torr. Komp...
Valves & Fittings, Measurement Technology, Process Technology
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- IHP GmbH - Leibniz-Institut für innovative Mikroelektronik
- Published:
- June 04, 2026
- Deadline:
- July 07, 2026
- Topic:
- Valves & Fittings
Tender description
Upgrade eines bestehenden 200 mm Wolfram-CVD-Systems (AMAT) auf WxZ Sprint Konfiguration: Lieferung, Integration und Inbetriebnahme von Hard- und Software sowie Modifikation des Gasverteilungssystems für gepulste Wolfram-Abscheidung (High Aspect Ratio Gap-Fill) und Integration zusätzlicher Hardware für Depositionsdrücke bis 300 Torr. Kompatibilität mit vorhandener Anlagenkonfiguration erforderlich.
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- The submission deadline is 07. Juli 2026.
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