IHP GmbH - Leibniz-Institut für innovative MikroelektronikTED
Semi-automated probe system with accessories
Beschaffung eines neuen integrierten Systems zur optischen und optoelektrischen Charakterisierung auf Wafer- und Chipebene im sichtbaren Spektralbereich (VIS). Enthält eine semi-automatische 200-mm-Probestation für den Laboreinsatz außerhalb des Reinraums, temperaturgeregelten Chuck, hochauflösendes Mikroskopsystem, manuelle Manipulatoren...
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- Tender type:
- Tender
- Contracting authority:
- IHP GmbH - Leibniz-Institut für innovative Mikroelektronik
- Published:
- May 12, 2026
- Deadline:
- Not specified
Tender description
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Beschaffung eines neuen integrierten Systems zur optischen und optoelektrischen Charakterisierung auf Wafer- und Chipebene im sichtbaren Spektralbereich (VIS). Enthält eine semi-automatische 200-mm-Probestation für den Laboreinsatz außerhalb des Reinraums, temperaturgeregelten Chuck, hochauflösendes Mikroskopsystem, manuelle Manipulatoren für HF-/DC-Sonden und Glasfasern sowie Steuerelektronik, Software (Windows 11 kompatibel), Verkabelung und Zubehör. Fernsteuerung über GPIB und LAN erforderlich. Lieferung, Installation, Inbetriebnahme, 2-tägige Schulung vor Ort, technische Dokumentation. CE-konform, Neugerät, 24 Monate Garantie. Optional: 3-jähriger Wartungsvertrag mit Bühnenplanarisierung, Schmierung und Chuck-Kalibrierung. Lieferung nach INCOTERMS 2020 (DDP/DAP an IHP).
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