Fraunhofer-Gesellschaft, Einkauf B12TED
Plasmasystem (IZM-115.1) - PR1115793-2590-P
Lieferung von 1 Stück Plasmasystem (IZM-115.1) für Panels bis 600 mm. Das ICP-System dient dem Trockenätzen sehr feiner RDLs (< 5 µm, Ziel 2 µm) auf großen organischen Substraten, um Nasschemie zu ersetzen und Unterfräsen von Cu-Leitungen zu vermeiden. Es ist für hohe Ätzraten organischer Materialien (Fotolacke, ABF) ausgelegt und ermögli...
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Fraunhofer-Gesellschaft, Einkauf B12
- Published:
- April 12, 2026
- Deadline:
- May 11, 2026
Tender description
Lieferung von 1 Stück Plasmasystem (IZM-115.1) für Panels bis 600 mm. Das ICP-System dient dem Trockenätzen sehr feiner RDLs (< 5 µm, Ziel 2 µm) auf großen organischen Substraten, um Nasschemie zu ersetzen und Unterfräsen von Cu-Leitungen zu vermeiden. Es ist für hohe Ätzraten organischer Materialien (Fotolacke, ABF) ausgelegt und ermöglicht schnelle, industriell kompatible Ätzzyklen.
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- The submission deadline is 11. Mai 2026.
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- The contracting authority is Fraunhofer-Gesellschaft, Einkauf B12.
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