TEKNOLOGIAN TUTKIMUSKESKUS VTT OYVTTTED
Metal CMP and brush cleaner
Lieferung eines automatischen metallischen Chemical Mechanical Polishing (CMP)-Systems mit integrierter Wafer-Reinigung für 200-mm-Halbleiterwafer. Das System muss Kupfer-, Barriere-, TSV- und Quantenmaterialien polieren können, mit 3 Polierplatten, jeweils mit integrierter Pad-Konditionierung, mehreren Endpunktdetektionssystemen, Multi-Z...
Type: Tender
Process Technology
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
- Published:
- May 26, 2026
- Deadline:
- Not specified
- Topic:
- Process Technology
Tender description
Lieferung eines automatischen metallischen Chemical Mechanical Polishing (CMP)-Systems mit integrierter Wafer-Reinigung für 200-mm-Halbleiterwafer. Das System muss Kupfer-, Barriere-, TSV- und Quantenmaterialien polieren können, mit 3 Polierplatten, jeweils mit integrierter Pad-Konditionierung, mehreren Endpunktdetektionssystemen, Multi-Zonen-Membranköpfen, Zufuhr für mindestens 4 Slurries und DIW pro Platte sowie Plattentemperaturregelung. Integrierte Reiniger mit Dampftrocknung für Low-k-Materialien. Waferhandling über SMIF. Erforderlich für Forschungsumgebung mit nicht standardmäßigen Wafern. Lieferung, Installation und Inbetriebnahme inbegriffen.
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