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Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.TED

Maskaligner 200mm - PR971169-2790-W

Beschaffung eines Maskaligners zur beidseitigen Belichtung und zum Prebonden von Silicium- und Siliciumcarbidwafern mit UV-empfindlichen Fotolacken. Unterstützte Wafergrößen sind 100 mm, 150 mm und 200 mm. Das System muss zudem die Verarbeitung von Bruchstücken und kleineren Substraten ermöglichen.

Type: Tender

Laboratory Instruments

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Content at a glance

Tender type:
Tender
Contracting authority:
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Published:
March 25, 2026
Deadline:
Not specified
Topic:
Laboratory Instruments

Tender description

Beschaffung eines Maskaligners zur beidseitigen Belichtung und zum Prebonden von Silicium- und Siliciumcarbidwafern mit UV-empfindlichen Fotolacken. Unterstützte Wafergrößen sind 100 mm, 150 mm und 200 mm. Das System muss zudem die Verarbeitung von Bruchstücken und kleineren Substraten ermöglichen.

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