Danmarks Tekniske Universitet - DTUKgs. LyngbyTED
Kauf eines neuen DUV-Steppers mit 248 nm Wellenlänge für die Chipproduktion
To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper using a 248 nm wavelength laser as illumination source (KrF laser unit from CYMER). It must furthermore be possible to handle several different wafer types and sizes: Wa...
Laboratory Instruments
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Danmarks Tekniske Universitet - DTU
- Published:
- March 09, 2026
- Deadline:
- Not specified
- Topic:
- Laboratory Instruments
Tender description
To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper using a 248 nm wavelength laser as illumination source (KrF laser unit from CYMER). It must furthermore be possible to handle several different wafer types and sizes: Wafer materials: Silicon, LNOI, Borofloat, quartz, III-V Wafer sizes in diameter: 100mm, 150mm and 200mm, furthermore it must be equipped with a multi wafer handl
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