Helmholtz-Zentrum Dresden-Rossendorf e.V.TED
Deep Reactive Ion Etching (DRIE) Si fluorine chemistry etcher
Beschaffung eines Deep Reactive Ion Etching (DRIE) Si-Fluor-Chemie-Ätzers für das IBC-Reinraumlabor (MagKI-Programm). Das Gerät ermöglicht Deep-Trench- (Bosch-Prozess) und Through-Via-Ätzungen in Si, SiC sowie 2D-Materialien (Graphen, MoS2). Anforderungen: ISO-Klasse-6-Betrieb, Probenladung in ISO 4/5, CE-Kennzeichnung, Dokumentation (DE/...
Laboratory Instruments
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Helmholtz-Zentrum Dresden-Rossendorf e.V.
- Published:
- March 25, 2026
- Deadline:
- April 28, 2026
- Topic:
- Laboratory Instruments
Tender description
Beschaffung eines Deep Reactive Ion Etching (DRIE) Si-Fluor-Chemie-Ätzers für das IBC-Reinraumlabor (MagKI-Programm). Das Gerät ermöglicht Deep-Trench- (Bosch-Prozess) und Through-Via-Ätzungen in Si, SiC sowie 2D-Materialien (Graphen, MoS2). Anforderungen: ISO-Klasse-6-Betrieb, Probenladung in ISO 4/5, CE-Kennzeichnung, Dokumentation (DE/EN), Lieferung/Installation/SAT bis 01.06.2027, mind. 2 Jahre Garantie. Ort: HZDR Dresden, IBC, Gebäude 711, Raum 105. Lieferung DPU Dresden.
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- The submission deadline is 28. April 2026.
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