Annealing Furnace (IAF-06.2)
Beschreibung: 1 Stück Annealing Furnace Das Fraunhofer IAF plant die Anschaffung eines Hochtemperatur-Glühofens. Der Temperaturbereich für die thermische Bearbeitung soll von Raumtemperatur bis zu 1000 °C reichen. Das System soll in der Lage sein, 100- und 150-mm-Wafer zu bearbeiten. Die bei Atmosphärendruck verwendeten Prozessgase sind N...
Compressors, Measurement Technology, Process Technology
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Content at a glance
- Tender type:
- Tender
- Contracting authority:
- Public contracting authority
- Published:
- April 08, 2026
- Deadline:
- Not specified
- Topic:
- Compressors
Tender description
Beschreibung: 1 Stück Annealing Furnace Das Fraunhofer IAF plant die Anschaffung eines Hochtemperatur-Glühofens. Der Temperaturbereich für die thermische Bearbeitung soll von Raumtemperatur bis zu 1000 °C reichen. Das System soll in der Lage sein, 100- und 150-mm-Wafer zu bearbeiten. Die bei Atmosphärendruck verwendeten Prozessgase sind N2 und O2. Option 1: Contamination and particle prevention Option 2: Manual control of heating, cooling and mass flow controllers Option 3: Remote maintenance
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